Vacuum Relay
Vacuum Relays for High-Voltage, RF, and Power Switching Applications
A vacuum relay utilizes a hermetically sealed ceramic or glass envelope evacuated to high vacuum levels as the primary arc-quenching and insulating medium. Operating in a vacuum eliminates ionized gases, preventing high-voltage arc breakdown and significantly increasing dielectric strength compared to air-insulated relays of comparable dimensions.
These components handle high continuous working voltages, high RF frequencies, and heavy pulsed currents within compact form factors. Industrial deployment requires precise matching of contact materials, dielectric barriers, and coil parameters to prevent premature contact wear, voltage tracking, and hermetic seal failure in demanding operating environments.
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Product Types
High-Voltage DC Vacuum Relays:
Configured for high-voltage DC blocking, capacitor discharge circuits, and industrial power supplies. Characterized by high dielectric withstand voltages and tungsten-alloy contact configurations designed to resist material transfer and pitting under DC loads.
RF Vacuum Relays:
Engineered for radio frequency transmission lines, antenna tuning units, and MRI gradient amplifiers. Designed with low and stable contact resistance, minimized distributed capacitance, and high current-carrying capacity at frequencies ranging from tens of kilohertz to gigahertz.
High-Current / Pulse Power Vacuum Relays:
Built for heavy-duty energy storage discharge, pulsed power testing systems, and industrial laser power supplies. Incorporates heavy-duty contact structures to handle high surge currents without contact welding.
SPST / SPDT Vacuum Relay Modules:
Available in Single-Pole Single-Throw (Normally Open or Normally Closed) and Single-Pole Double-Throw switching geometries, integrated with standardized mounting flanges and flying leads or threaded terminals.
Key Specifications
|
Technical Parameter |
Standard Operating Range / Specification Options |
|
Max. Switching Voltage (DC / 50Hz) |
Up to 30 kV Peak |
|
RF Operating Frequency |
Up to 30 MHz (model dependent) |
|
Continuous Carry Current |
10 A to 100+ A RMS |
|
Contact Resistance |
Less than or equal to 0.015 ohms (initial) |
|
Dielectric Withstand Voltage |
Tested to 125 percent of rated operating voltage |
|
Operate Time (including bounce) |
5 ms to 15 ms |
|
Release Time |
3 ms to 10 ms |
|
Mechanical Life |
1 million to 10 million operations |
|
Coil Voltage Options |
12 VDC, 24 VDC, 26.5 VDC, 48 VDC |
|
Operating Temperature Range |
-55 degrees Celsius to +85 degrees Celsius (or +125 degrees Celsius max. ceramic envelope rating) |
High-Vacuum Arc Suppression: The internal vacuum level exceeds 10 to the power of -6 Torr, providing rapid dielectric recovery across open contacts following arc interruption.
Low Contact Resistance Stability: Precision-machined refractory metal contact tips (such as copper-tungsten or silver-cadmium oxide alternatives compliant with environmental directives) maintain low milliohm resistance over extended operating lifecycles.
Hermetic Ceramic-to-Metal Sealing: High-alumina ceramic envelopes joined to oxygen-free copper and Kovar hardware via high-temperature vacuum brazing ensure long-term leak tightness against atmospheric permeation.
Minimal Capacitance and Leakage Current: Structural geometry minimizes parasitic capacitance and external surface leakage paths, ensuring performance in high-frequency RF matching networks.
Magnetic Circuit Efficiency: Optimized internal magnetic armatures reduce operating coil power while maintaining high contact closing force to prevent contact bounce and chattering under mechanical shock or vibration.
Applications
Semiconductor Manufacturing Equipment:
Used in electrostatic chuck (ESC) DC clamping supplies, RF plasma generation systems, and ion implantation equipment.
Medical Imaging Systems:
Integrated into high-voltage switching matrices for Magnetic Resonance Imaging (MRI) gradient coils and X-ray generator power units.
Radio Frequency Communications:
Deployed in high-power transmitters, antenna coupling units, industrial dielectric and induction heating generators, and radar systems.
Pulsed Power & Research Test Benches:
Applied in capacitor bank discharge circuits, laser trigger systems, and high-voltage test equipment.
Define Electrical Load Parameters: Determine maximum operating voltage (DC or peak RF), continuous carry current, and peak transient current during switching.
Select Switching Configuration: Choose SPST-NO, SPST-NC, or SPDT based on fail-safe requirements and circuit architecture.
Evaluate Frequency Constraints: For applications above 1.5 MHz, select designated RF vacuum relays with low insertion loss and specified capacitance ratings.
Verify Coil and Control Parameters: Match the coil drive voltage to system control logic (e.g., 24 VDC PLC outputs) and verify coil transient suppression requirements.
Assess Environmental and Mechanical Constraints: Check mounting orientation restrictions, operating temperature limits, and mechanical shock/vibration thresholds specified in the mechanical drawing.
Manufacturing and Quality Control
Vacuum Baking & Outgassing:
Internal metallic and ceramic components undergo high-temperature vacuum furnace baking to eliminate residual surface volatiles prior to final assembly.
01
Controlled Atmosphere Brazing:
Ceramic-to-metal assemblies are joined in automated vacuum brazing furnaces under strict temperature profiles to eliminate joint voids and micro-cracks.
02
Helium Mass Spectrometer Leak Testing:
Every sealed envelope undergoes high-sensitivity helium leak detection capable of identifying leak rates below 1 times 10 to the power of -9 Pa cubic meters per second.
03
High-Voltage Dielectric Testing:
Relays are subjected to routine flashover and breakdown voltage testing in specialized test chambers at voltages exceeding rated operational thresholds.
04
Parametric Automated Test Rig Verification:
100 percent of production units are tested for operate time, release time, contact resistance, and coil resistance using automated test equipment (ATE) with data logging traceability.
05
Packaging and Delivery
Anti-Static & Hermetic Packaging:
Individual units are sealed in anti-static moisture-barrier bags containing desiccants to prevent oxidation of external metal terminals during transit.
Shock-Absorbing Transit Enclosures:
Molded high-density foam inserts secure each relay within multi-layer corrugated master cartons to prevent mechanical shock transmission during international freight.
Documentation Inclusion:
Each shipment includes individual test data sheets covering dielectric withstand voltage, contact resistance, and lot traceability identifiers.
Our Certificate
FAQ
As one of the most professional vacuum relay manufacturers and suppliers in China, we also support customized service. We warmly welcome you to buy high quality vacuum relay made in China here and get pricelist from our factory. For price consultation, contact us.
Long Life Relay, Reliable Relay, High Voltage Vacuum Relay